The MEMS of Figure 7.42 is formed of two pairs of beams
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The MEMS of Figure 7.42 is formed of two pairs of beams and a shuttle mass that are placed on a massless platform. The p
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The MEMS of Figure 7.42 is formed of two pairs of beams and a shuttle mass that are placed on a massless platform. The platform is subjected to input displacement u and the shuttle mass displacement is measured capacitively. Use a lumped-parameter model with known mass m, stiffness k, and damping coeffcient c to formulate the mathematical model of the shuttle mass motion y and determine the transfer function Y(s)/U(s). Also use complex impedances and a mechanical impedance circuit to calculate the system
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