A voltage v = 5d(t) nV (where d(t) is the unit impulse)
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A voltage v = 5d(t) nV (where d(t) is the unit impulse) is supplied to the rotary capacitive MEMS actuator of Figure 10.
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A voltage v = 5d(t) nV (where d(t) is the unit impulse) is supplied to the rotary capacitive MEMS actuator of Figure 10.50, which operates in air. Find and plot the time response of the mobile armature knowing its moment of inertia is J = 10-18 kg-m2, the viscous damping coeffcient (not symbolized in Figure 9.50) is c = 30 N-m-s, and the spiral spring stiffness is k = 2 N-m. Known also are the fxed gap g = 4 nm and the radius R = 220 nm.
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