A microcantilever, such as the one sketched in Figure 11
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A microcantilever, such as the one sketched in Figure 11.68, receives an input displacement u from a rigid frame and, as
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A microcantilever, such as the one sketched in Figure 11.68, receives an input displacement u from a rigid frame and, as a result, undergoes bending vibrations; the cantilever free end de?ection is z. This de?ection is sensed optoelectronically by a photodiode whose output voltage is proportional (constant Ks) to the input cantilever free-end de?ection. When these two units are connected in a standard nonunity-feedback control system with a summing point, (a) Express the steady-state error in terms of the transfer functions involved and a generic reference signal. Use a lumped-parameter model for the cantilever with mass m, viscous damping coeffcient c, and stiffness k
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