A MEMS capacitive actuator with one fxed plate and two m
Question and Solution
A MEMS capacitive actuator with one fxed plate and two mobile plates is sketched in Figure 4.41. Evaluate the resulting
91 % (281 Review)
A MEMS capacitive actuator with one fxed plate and two mobile plates is sketched in Figure 4.41. Evaluate the resulting force acting on the mobile pair as a function of the changing gap when an external voltage v = 20 ?V is applied between the fxed and the mobile plates. Initially, the fxed plate is placed symmetrically between the mobile plates. The distance between the two mobile plates is d = 5 ?m, the plate overlapping area is 8000 ?m2, and f0 = 8.8 # 10?12 F/m. Also calculate the resulting force corresponding to a minimum gap gmin = d/500.
Your answer will be ready within 2-4 hrs. Meanwhile, check out other millions of Q&As and Solutions Manual we have in our catalog.
Get immediate access to 24/7 Homework Help, step-by-step solutions, instant homework answer to over 40 million Textbook solution and Q/A
Pay $7.00/month for Better Grades
Crazy for Study is a platform for the provision of academic help. It functions with the help of a team of ingenious subject matter experts and academic writers who provide textbook solutions to all your course-specific textbook problems, provide help with your assignments and solve all your academic queries in the minimum possible time.
Disclaimer: Crazy For Study provides academic assistance to students so that they can complete their college assignments and projects on time. We strictly do not deliver the reference papers. This is just to make you understand and used for the analysis and reference purposes only.